Igwe ihe nkpuchi lithography igwe na-edozi foto-etching igwe
Ntinye ngwaahịa
Isi iyi ọkụ na-ebubata UV LED na modul na-akpụzi isi iyi ọkụ, yana obere okpomọkụ yana ezigbo nkwụsi ike.
Ọdịdị ọkụ na-atụgharị nwere mmetụta dị mma na-ekpo ọkụ ọkụ na mmetụta dị nso na ìhè, na ngbanwe na nrụzi oriọna mercury dị mfe ma dị mma. Ejiri ya na microscope binocular dual field microscope dị elu na 21 inch wide screen LCD, enwere ike ịhazi ya site na anya.
Ngosipụta anya ma ọ bụ CCD +, nwere nhazi nhazi dị elu, usoro nghọta na ọrụ dị mma.
Atụmatụ
Na ọrụ nhazi iberibe
Ịkwalite nrụgide kọntaktị na-eme ka a mata nkwughachi site na ihe mmetụta
Enwere ike ịtọ oghere nhazi na oghere mkpughe na dijitalụ
Iji kọmpụta agbakwunyere + arụ ọrụ ihuenyo mmetụ, dị mfe ma dabara adaba, mara mma na mmesapụ aka
Dịrị pịnye elu na ala efere, dị mfe na adaba
Kwado mkpughe kọntaktị oghere, mkpughe kọntaktị siri ike, mkpughe kọntaktị na mkpughe nso
Na nano imprint interface ọrụ
Ikpughe otu oyi akwa nwere otu igodo, ogo akpaaka dị elu
Igwe a nwere ntụkwasị obi dị mma na ngosipụta dabara adaba, ọkachasị dabara maka nkuzi, nyocha sayensị na ụlọ ọrụ na kọleji na mahadum
Nkọwa ndị ọzọ
Nkọwapụta
1. Ebe ngosi: 110mm × 110mm;
2. ★ Ogologo nkpughe: 365nm;
3. Mkpebi: ≤ 1m;
4. Nkwenye ziri ezi: 0.8m;
5.Oghere mmegharị nke tebụl nyocha nke usoro nhazi ga-ezute ma ọ dịkarịa ala: Y: 10mm;
6. Igwe ọkụ aka ekpe na aka nri nke usoro nhazi nwere ike ịkwaga iche na ntụziaka X, y na Z, ntụziaka X: ± 5mm, Y ntụziaka: ± 5mm na Z ntụziaka: ± 5mm;
7. nha nkpuchi: 2.5 sentimita asatọ, 3 sentimita asatọ, 4 sentimita, 5 sentimita;
8. Nlereanya nha: iberibe, 2 ", 3", 4 ";
9. ★ Kwesịrị ekwesị maka sample ọkpụrụkpụ: 0.5-6mm, na ike na-akwado 20mm sample iberibe na ọtụtụ (ahaziri);
10. Ọnọdụ ngosi: oge (ọnọdụ ọnụ ọgụgụ);
11. Na-abụghị otu nke ọkụ: 2.5%;
12. Mikroskopu nke abụọ CCD alignment: oghere mbugharị (ugboro 1-5) + oghere ebumnuche microscope;
13. Ntugharị mmegharị nke ihe nkpuchi n'ihe gbasara nlele ahụ ga-ezute ma ọ dịkarịa ala: X: 5mm; Y: 5mm; : 6º;
14. ★ Ngosi ike ike:> 30MW / cm2,
15. ★ The itinye n'ọnọdụ na ikpughe ọnọdụ ọrụ na abụọ ọdụ, na abụọ ọdụ servo moto switches na-akpaghị aka;
16. Ịkwado nrụgide kọntaktị na-eme ka a hụ na a na-emegharịghachi site na ihe mmetụta;
17. ★ The alignment ọdịiche na ikpughe ọdịiche nwere ike ịtọ digitally;
18. ★ Ọ nwere nano akara interface na idi nso interface;
19. ★ Touch ihuenyo ọrụ;
20. N'ozuzu akụkụ: Banyere 1400mm (ogologo) 900mm (obosara) 1500mm (ịdị elu).
